Effect of Al pre-deposition layer on the epitaxial growth of silicon on Al 2 O 3 /Si (111) substrates

Author: Ishida M.   Jung Y.-C.   Miura H.   Koji Y.   Sawada K.   Yoshimoto M.   Keisuke M.   Takahumi M.   Hideaki M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 134-137

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Abstract