Oxidation behavior of (Ti 1-x Al( x ))N films prepared by r.f. reactive sputtering

Author: Inoue S.   Uchida H.   Koterazawa K.   Yoshinaga Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.300, Iss.1, 1997-05, pp. : 171-176

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Abstract