Deposition of BaTiO 3 thin films by plasma MOCVD

Author: Chiba T.   Itoh K.-I.   Matsumoto O.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.300, Iss.1, 1997-05, pp. : 6-10

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract