Dependence of the properties of (Sr x Ti 1-x )O 3 thin films deposited by plasma-enhanced metal-organic chemical vapor deposition on electron cyclotron resonance plasma

Author： Lee J.S.   Song H.W.   Jun B.-H.   Kwack D.H.   Yu B.G.   Jiang Z.-T.   No K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.301, Iss.1, 1997-06, pp. : 154-161

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