Surface studies of chemically vapour-deposited silicon films using friction force microscopy

Author: Flueraru C.   Cosmin P.   Cobianu C.   Dascalu D.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.303, Iss.1, 1997-07, pp. : 117-121

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Abstract