Study of the influence of oxygen on the composition of thin films obtained by r.f. sputtering from a Ca 5 (PO 4 ) 3 OH target

Author： Van Dijk K. Jansen J.A. Verhoeven J. Maree C.H.M. Habraken F.H.P.M.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.304, Iss.1, 1997-07, pp. : 191-195

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