Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by r.f. reactive magnetron sputtering

Author： Boulouz M.   Boulouz A.   Giani A.   Boyer A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.323, Iss.1, 1998-06, pp. : 85-92

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