![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Kylner C. Mattsson L.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.307, Iss.1, 1997-10, pp. : 169-177
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
A study of hillock formation on Al-Ta alloy films for interconnections of TFT-LCDs
By Iwamura E. Ohnishi T. Yoshikawa K.
Thin Solid Films, Vol. 270, Iss. 1, 1995-12 ,pp. :
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
The effect of precipitation on the optical properties of Al-Zn thin films
By El-Salam F.A. Ibraheim A.M. Ammar A.H.
Vacuum, Vol. 48, Iss. 1, 1997-01 ,pp. :
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Optical properties of AlN thin films correlated with sputtering conditions
By Gadenne M. Plon J. Gadenne P.
Thin Solid Films, Vol. 333, Iss. 1, 1998-11 ,pp. :