Phase formation process of Ir x Si 1-x thin films structure and electrical properties

Author： Kurt R.   Pitschke W.   Heinrich A.   Schumann J.   Thomas J.   Wetzig K.   Burkov A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.310, Iss.1, 1997-11, pp. : 8-18

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