Effect of Xe + bombardment on the formation of highly oriented rutile-type titanium oxide films

Author: Zhang F.   Zheng Z.   Chen Y.   Mao Y.   Liu X.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.312, Iss.1, 1998-01, pp. : 1-3

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Abstract