Oxidation behavior of CVD TiN-Ti 5 Si 3 composite coatings

Author: Llauro G.   Gourbilleau F.   Sibieude F.   Hillel R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.315, Iss.1, 1998-03, pp. : 336-344

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Abstract