The strengthening mechanism of DLC film on silicon by MPECVD

Author: Sung S.L.   Guo X.J.   Huang K.P.   Chen F.R.   Shih H.C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.315, Iss.1, 1998-03, pp. : 345-350

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract