Porous structure of silica films obtained by monosilane oxidation

Author: Dultsev F.N.   Nenasheva L.A.   Vasilyeva L.L.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.315, Iss.1, 1998-03, pp. : 72-76

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Abstract