Effects of UV light irradiation and excess Zn addition on ZnO:Al film properties in sputtering process

Author: Tominaga K.   Umezu N.   Mori I.   Ushiro T.   Moriga T.   Nakabayashi I.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.316, Iss.1, 1998-03, pp. : 85-88

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Abstract