Spectroellipsometry and electron spectroscopy of porous Si thin films on p + substrates

Author: Robert C.   Bideux L.   Gruzza B.   Cadoret M.   Lohner T.   Fried M.   Vazsonyi E.   Gergely G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.317, Iss.1, 1998-04, pp. : 210-213

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Abstract