Submicrometer patterning of epitaxial CoSi 2 /Si(111) by local oxidation

Author: Klinkhammer F.   Kappius L.   Mesters S.   Mantl S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.318, Iss.1, 1998-04, pp. : 163-167

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Abstract