Author： Hofmann J. Veprek S.
Publisher： Elsevier
ISSN： 0040-6090
Source： Thin Solid Films, Vol.318, Iss.1, 1998-04, pp. : 18-21
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Access to resources
Recommend
Effect of chamber pressure on p-type c-SiC:H thin films prepared by photo-CVD
By Ray S. Dasgupta A. Ghosh S. Kshirsagar S.T.
Thin Solid Films, Vol. 295, Iss. 1, 1997-02 ,pp. :
PLD Grown 3C-SiC Thin Films on Si: Morphology and Structure
Materials Science Forum, Vol. 2015, Iss. 821, 2015-07 ,pp. :
3C-SiC Polycrystalline Films on Si for Photovoltaic Applications
Materials Science Forum, Vol. 2015, Iss. 821, 2015-07 ,pp. :