Electromigration failure model: its application to W plug and Al-filled vias

Author: Kawasaki H.   Gall M.   Jawarani D.   Hernandez R.   Capasso C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.320, Iss.1, 1998-05, pp. : 45-51

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract