Nucleation and growth of CVD Al on different types of TiN

Author： Avinun M.   Barel N.   Kaplan W.D.   Eizenberg M.   Naik M.   Guo T.   Chen L.Y.   Mosely R.   Littau K.   Zhou S.   Chen L.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.320, Iss.1, 1998-05, pp. : 67-72

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