Role of strain in dopant surface segregation during Si and SiGe growth by molecular beam epitaxy

Author: Ni W.-X.   Hansson G.V.   Cardenas J.   Svensson B.G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.321, Iss.1, 1998-05, pp. : 131-135

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Abstract