Residual strain and surface roughness of Si 1-x Ge x alloy layers grown by molecular beam epitaxy on Si(001) substrate

Author: Tatsuyama C.   Asano T.   Nakao T.   Matada H.   Tambo T.   Ueba H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 161-166

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Abstract