Structural, electrical and optical properties of zinc nitride thin films prepared by reactive rf magnetron sputtering

Author: Futsuhara M.   Yoshioka K.   Takai O.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.322, Iss.1, 1998-06, pp. : 274-281

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Abstract