Hydrogenated aluminum nitride thin films prepared by r.f. reactive sputtering. Infrared and structural properties

Author： Despax B. Loretz J.C. Marti P. Mazel A.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.265, Iss.1, 1995-09, pp. : 15-21

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