The effect of Ti ion bombardment on the interfacial structure between TiN and iron nitride

Author: Baek W.-S.   Kwon S.-C.   Lee J.-Y.   Lee S.-R.   Rha J.-J.   Nam K.-S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.323, Iss.1, 1998-06, pp. : 146-152

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Abstract