Phase composition and microstructure of polycrystalline and epitaxial TaN x layers grown on oxidized Si(001) and MgO(001) by reactive magnetron sputter deposition

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Elsevier

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In x O y N z films with a Ta 2 O 5 promoter for the detection of CO, H 2 , and CH 4

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Crystallographic and morphological characterization of reactively sputtered Ta, Ta-N and Ta-N-O thin films

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Ion-beam sputtering of (Ta 2 O 5 ) x -(SiO 2 ) 1-x composite thin films

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Properties of thin Ta-N films reactively sputtered on Cu/SiO 2 /Si substrates

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