SiC formation and influence on the morphology of polycrystalline silicon thin films on graphite substrates produced by zone melting recrystallization

Author: Hauttmann S.   Kunze T.   Muller J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.326, Iss.1, 1998-08, pp. : 175-179

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Abstract