Mechanical properties of SiO 2 and Si 3 N 4 coatings: a BAM/NIST co-operative project

Author： Beck U.   Smith D.T.   Reiners G.   Dapkunas S.J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 164-171

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