Texture and surface roughness of PRCVD aluminum films

Author： Yang D.   Jonnalagadda R.   Rogers B.R.   Hillman J.T.   Foster R.F.   Cale T.S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 312-318

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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