Preparation of CN x -phases using plasma-assisted and hot filament chemical vapour deposition

Author: Leonhardt A.   Gruger H.   Selbmann D.   Arnold B.   Thomas J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 69-73

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract