Bias enhanced deposition of highly oriented -SiC thin films using low pressure hot filament chemical vapour deposition technique

Author: George V.C.   Das A.   Roy M.   Dua A.K.   Raj P.   Zahn D.R.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.419, Iss.1, 2002-11, pp. : 114-117

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Abstract