A comparative study on the nucleation and growth of ECR-PECVD PLZT ((Pb,La)(Zr,Ti)O 3 ) thin films on Pt/SiO 2 /Si substrates and on Pt/Ti/SiO 2 /Si substrates

Author： Shin J.-S.   Lee W.-J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.333, Iss.1, 1998-11, pp. : 142-149

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Deposition and dielectric properties of CaCu 3 Ti 4 O 12 thin films on Pt/Ti/SiO 2 /Si substrates using pulsed-laser deposition

By Fang L.   Shen M.  

Thin Solid Films, Vol. 440, Iss. 1, 2003-09 ,pp. : 60-65

Elsevier

Access to resources Recommend Favorite

Multiferroic and resistive switching behaviors in BiFe0.95Cr0.05O3 thin films deposited on Pt/Ti/SiO2/Si substrates

By Luo B.   Wang J.   Cao X.   Jin K.   Chen C.  

Applied Physics A, Vol. 113, Iss. 3, 2013-11 ,pp. : 779-785

Springer Publishing Company

Access to resources Recommend Favorite

Structural and dielectric properties of Ba 0.7 Sr 0.3 TiO 3 thin films grown on thin Bi layer-coated Pt(111)/Ti/SiO 2 /Si substrates

By Yi W.-C.   Kalkur T.S.   Philofsky E.   Kammerdiner L.  

Thin Solid Films, Vol. 402, Iss. 1, 2002-01 ,pp. : 307-310

Elsevier

Access to resources Recommend Favorite

Stabilization of perovskite Pb(Mg 1/3 Nb 2/3 )O 3 thin film by a thin BaTiO 3 buffer layer on Pt/Ti/SiO 2 /Si

By Wakiya N.   Shinozaki K.   Mizutani N.  

Thin Solid Films, Vol. 409, Iss. 2, 2002-04 ,pp. : 248-253

Elsevier

Access to resources Recommend Favorite

Growth, characterization and interfacial reaction of magnetron sputtered Pt/CeO2 thin films on Si and Si3N4 substrates

By  

SURFACE AND INTERFACE ANALYSIS, Vol. 47, Iss. 7, 2015-07 ,pp. : 777-784

John Wiley & Sons Inc

Access to resources Recommend Favorite