Defect distribution and evolution in He + implanted Si studied by variable-energy positron beam

Author： Zhang M.   Lin C.   Weng H.   Scholz R.   Gosele U.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.333, Iss.1, 1998-11, pp. : 245-250

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