Sputter deposition of gallium nitride films using a GaAs target

Author: Elkashef N.   Srinivasa R.S.   Major S.   Sabharwal S.C.   Muthe K.P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.333, Iss.1, 1998-11, pp. : 9-12

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Abstract