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Elsevier

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Growth structure of nickel films on GaAs(001) by d.c.-biased plasma-sputter-deposition

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Structure and composition studies for silicon nitride thin films deposited by single ion bean sputter deposition

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Thermal stability of nonstoichiometric silicon nitride films made by reactive dc magnetron sputter deposition

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Thin Solid Films, Vol. 317, Iss. 1, 1998-04 ,pp. : 153-156

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Microstructure and nanomechanical properties of cubic boron nitride films prepared by bias sputter deposition

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