The growth of an intermediate CoSi phase during the formation of epitaxial CoSi 2 by solid phase reaction

Author: Falke M.   Gebhardt B.   Beddies G.   Teichert S.   Hinneberg H.-J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.336, Iss.1, 1998-12, pp. : 201-204

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Abstract