Comparison of lateral and vertical Si-MOSFETs with ultra short channels

Author: Behammer D.   Zeuner M.   Hackbarth T.   Herzog J.   Schafer M.   Grabolla T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.336, Iss.1, 1998-12, pp. : 313-318

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Abstract