Epitaxial growth at high rates with LEPECVD

Author: Rosenblad C.   Graf T.   Stangl J.   Zhuang Y.   Bauer G.   Schulze J.   von Kanel H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.336, Iss.1, 1998-12, pp. : 89-91

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract