Si 1-x Ge x selective epitaxial growth for ultra-high-speed self-aligned HBTs

Author: Oda K.   Ohue E.   Tanabe M.   Shimamoto H.   Washio K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 358-361

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Abstract