Chopping effect on the crystallinity of ZnO films prepared by a r.f. planar magnetron sputtering method

Author: Han B.M.   Chang S.   Kim S.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.338, Iss.1, 1999-01, pp. : 265-268

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Abstract