SiC formation and influence on the morphology of polycrystalline silicon thin films on graphite substrates produced by zone melting recrystallization

Author: Hauttmann S.   Kunze T.   Muller J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.338, Iss.1, 1999-01, pp. : 320-324

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract