Thermal characterization of anisotropic thin dielectric films using harmonic Joule heating

Author: Ju Y.S.   Kurabayashi K.   Goodson K.E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.339, Iss.1, 1999-02, pp. : 160-164

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Abstract