Solid single-source metal organic chemical vapor deposition of yttria-stabilized zirconia

Author: Dubourdieu C.   Kang S.B.   Li Y.Q.   Kulesha G.   Gallois B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.339, Iss.1, 1999-02, pp. : 165-173

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Abstract