An ellipsometric study of W thin films deposited on Si

Author： Deineka A.G.   Tarasenko A.A.   Jastrabk L.   Chvostova D.   Bousek J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.339, Iss.1, 1999-02, pp. : 216-219

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