Effects of the different heat treatments on the growth and formation of iron silicide on Si(100)

Author: Oh J.H.   Lee S.K.   Han K.P.   An K.S.   Park C.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 160-164

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Abstract