Evaluation of fluorinated polyimide etching processes for optical waveguide fabrication

Author： Kim J.H.   Kim E.J.   Choi H.C.   Kim C.W.   Cho J.H.   Lee Y.W.   You B.G.   Yi S.Y.   Lee H.J.   Han K.   Jang W.H.   Rhee T.H.   Lee J.W.   Pearton S.J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 192-195

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