Correlation between silicon particles and modulated crossed magnetic field in silane plasmas

Author： Tazoe K.   Yang S.C.   Maemura Y.   Ohtsu M.   Fujiyama H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 55-58

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