Structure and optical properties of Si incorporated diamond-like carbon films deposited by r.f. plasma-assisted chemical vapor deposition

Author： Lee S.   Kim D.-S.   Rhee S.-G.   Oh S.-g.   Lee K.-R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.341, Iss.1, 1999-03, pp. : 68-72

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