Temperature measurement of polymer substrates during plasma irradiation

Author： Yamamoto K.   Harada T.   Tomikawa N.   Uyama H.   Yang S.-C.   Fujiyama H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.345, Iss.1, 1999-05, pp. : 94-98

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