Experimental and modeling study of the sputtered particle transport in an r.f. magnetron discharge

Author: Clenet F.   Lemperiere G.   Turban G.   Briaud P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.346, Iss.1, 1999-06, pp. : 290-298

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Abstract