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Vacuum, Vol. 49, Iss. 1, 1998-01 ,pp. : 43-47

Elsevier

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Sputter-deposited Mo and reactively sputter-deposited Mo-N films as barrier layers against Cu diffusion

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Composition and structure of reactively sputter-deposited molybdenum-carbon films

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Crystallization-induced stress in reactively sputter-deposited molybdenum nitride thin films

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Friction coefficient and wear rate of sputter-deposited thin films and plasma-sprayed thick coatings at high temperatures in room air

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