Erosion and deposition during the sputter cleaning of substrates prior to the cathodic arc evaporation of transition metal nitride coatings

Author： MacKenzie M.   Craven A.J.   Hatto P.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.349, Iss.1, 1999-07, pp. : 176-185

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